Home > ڷ > UV > Excimer UV
 
 



 

Excimer UV

1. ø ʿ伺

UV ø UV Ϲ UV UV̴.
Ϲ UV 253.7nm 184.9nm ´. 184.9nm 154.7kcal/mol Ƿ Ҽ ظ ִ.
׷ 140.5 kcal/mol C =C ̳, 190 kcal/mol C=O 184.9nm 154.7kcal/mol ̷ Ұϴ. LCD̳ ǥ ̰ PVC, PP, PE, PET, PS,ݼ ǥ鿡 ִ Ҽ 2 հ 3 ִ.

̷ 2, 2 ؼ 253.7nm 184.9nm 154.7kcal/mol δ ϴ. 184.9nm ؼ ª ̳, ȭ ʿϰ Ǿ. ׷ ߵ 172nnm 146nm ߻ϴ Excimer UV̴.


2. E-UV

UV  Ƿ 184.9 253.7, 298, 302 365, 403, 436, 546 ´. ſ ª ϴ ϸ ȴ. ̷δ ó ѵ ߵ ʿ Ͽ ų ִµ Ͽ Excimer UV ʰ 1/10 9 ª ð ª ߻Ҽ ִ ٴ ʴ.

ũ(Xe) ܰ ڰ ¿ ǰ ¿ ϰ ũ ڴ ٽ · ƿ´. Ǵ 172nm̴. ũ(Xe) Ǹ ܿ ڿ ڰ 2 2 ڰ Ǵµ ̷ 2 ڸ dimer Ѵ. 2 ũ 2 · ϴ° ƴ϶ 10 1 ª ð ٽ · ȸ͵ȴ. ׷ Ȯ excimer ٴ hetero excimer Ǵ exciplex θ Ȯ ε Ư ʰ excimer θ. ǹ̷δ excited state of dimer Ȥ extreamly short excited dimer ǹ̴.

3. ø 뵵

Excimer LCD, Wafer ߿ϰ Ǵ ̴.
ڵ ó excimer ȰҼ ̶ ־, 1980뿡 excimer ̷ . ʱ excimer θ ϱ ư ʾƼ Ǵ ܴ ʾҴ. ׷ LCD, Wafer е 鼭 䱸ϰ Ǿ, ̿ ϴ excimer UV Ȥ excimer ۿ Ƿ excimer ǹǷ øӰ ǰ Ǿ.

4. ø

1) Ƿ Light Source ִ.
2) ڿܼ ϹǷ Һ ū ִ.
3) ʰ ϹǷ ν .
4) Light Source ü ϹǷ ϴ.
5) ߿ Ƿ ó ջǴ .
6) ƴϰ ̹Ƿ ȿ .
7) ̹Ƿ ⹰ ӵ ö ʴ.
8) ó 󹰰 Ÿ 2-3mm ƾ ϹǷ ǰ ִ.


5. Wafer, TFT, Glass ø

ݵü LCD, TFT, Color Filter ִ.
flow ȸ縶 ټ ٸǷ Ϸ ϱ ϳ ( ũ A) Ҽ ؾ ϴ м 䱸ȴٴ ̴. ⺻ ͸ ϸ

1) DZ Ϻϰ clean · ԰Ǿ, ԵDZ ٽ ؾ Ѵ. ** ð contamination Ͼ ִ.

2) Ҽ ִ δ ļ ǽļ, ǰ ִ.

3) ļ ǰ δ ũ ϱ ư, ǿ ִ IPA ɹĮ ü ɰ .

4) ׿ ǽļ̸, ǽ ٽ ö uv ִ.

5) ö ⼺ Ҽ ö ⿡ CO2 H2O ϴ μ Ҽ ȿ Pattern ջ ִ.

6) ö Ͼ Ƿ TFT pattern ջǸ ȵǴ No Streamer ö Ҽ ִ.

7) patern damage ⹰ ִ ø̹Ƿ LCD øӸ ϰ , ó ӵ Ƽ No Streamer ö ϰ ִ.